Self-Aligned Interdigitated Transducers for Acoustofluidics
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چکیده
منابع مشابه
Self-Aligned Interdigitated Transducers for Acoustofluidics
The surface acoustic wave (SAW) is effective for the manipulation of fluids and particles at microscale. The current approach of integrating interdigitated transducers (IDTs) for SAW generation into microfluidic channels involves complex and laborious microfabrication steps. These steps often require full access to clean room facilities and hours to align the transducers to the precise location...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2016
ISSN: 2072-666X
DOI: 10.3390/mi7120216